DSI’s photolithography capability produces precision patterned thin film coatings both by wafer level processing and complex geometry processing. This process results in very small feature sizes accurately placed physically on the wafer or part. DSI is capable to doing both positive and negative resist processes. Our standard wafer diameters are 100mm, 150mm and 200mm. Applications include multispectral filters, hyperspectral filters, sensor band pass filters, colorimetry and many others.
Photolithography & Patterning Products