The MicroDyn® process is a short-throw reactive sputtering process. The process is highly flexible, with the capability to deposit metals, metal oxides, nitrides, mixed materials with fixed or graded compositions, ITO, and semiconductor materials. Selected coatings are capable of operating at temperatures as high as 1000˚C and can withstand the thermal shock of direct transition from liquid nitrogen to boiling water. MicroDyn coatings, including complex filters, can be patterned using both contact masking and photolithography.
MICRODYN® Sputtered Coating Products